2D200

Lateral-(XY)-Calibration Standard

The standard (2D200) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 200nm pitch etched into a silicon chip. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS™ will mediate a contract between the customer and PTB. Please ask for details.

Features:

• 200 nm pitch

• high accuracy

2D300

Lateral-(XY)-Calibration Standard

The standard (2D300) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS™ will mediate a contract between the customer and PTB. Please ask for details.

Features:

• 300 nm pitch

• high accuracy

H8

Height Standard with 8 nm nominal stepheight

The standard (H8) is used for a very precise z-calibration of the scanning mechanism. The standard consists of multiple areas of hole and stripe arrays etched into silicon. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. Please ask for terms and delivery.

Features:

• small step height