1A

Rotated

17 µm(15 - 19 µm)*

15 µm(10 - 20 µm)*

< 10 nm

20°-25° front view 25°-30° from side 10° at the   apex

2B

Rotated

17 µm(15 - 19 µm)*

15 µm(10 - 20 µm)*

< 10 µm

20°-25° front view 25°-30° from side 10° at   the apex

3C

Rotated

17 µm(15 - 19 µm)*

15 µm(10 - 20 µm)*

< 10 nm

20°-25° front view 25°-30° from side 10° at   the apex

4D

Rotated

17 µm(15 - 19 µm)*

15 µm(10 - 20 µm)*

< 10 nm

20°-25° front view 25°-30° from side 10° at   the apex

1A

Beam

500 µm(490 - 510 µm)*

30 µm(25 - 35 µm)*

2.7 µm(1.7 - 3.7 µm)*

0.2 N/m(0.04 - 0.7 N/m)*

15 kHz(10 - 20 kHz)*

2B

Beam

210 µm(200 - 220 µm)*

30 µm(25 - 35 µm)*

2.7 µm(1.7 - 3.7 µm)*

2.7 N/m(0.4 - 10 N/m)*

80 kHz(50 - 110 kHz)*

3C

Beam

150 µm(140 - 160 µm)*

30 µm(25 - 35 µm)*

2.7 µm(1.7 - 3.7 µm)*

7.4 N/m(1 - 29 N/m)*

150 kHz(70 - 230 kHz)*

4D

Beam

100 µm(90 - 110 µm)*

50 µm(45 - 55 µm)*

2.7 µm(1.7 - 3.7 µm)*

40 N/m(7 - 160 N/m)*

350 kHz(200 - 500 kHz)*